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Title:Measurement of Electron Density and Temperature in Silicon Microplasma Devices by Optical Emission Spectroscopy
Author(s):Li, Benben
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
electron density
silicon microplasma devices
optical emission spectroscopy
OES
microplasma devices
helium microplasma diagnostics
micro-langmuir probe
Issue Date:2008
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96437
Rights Information:Copyright 2002 Ning Li
Date Available in IDEALS:2017-07-06


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