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Title:Plasma Assisted Cleaning by Electrostatics of Insulating Nanometer Scale Contamination from Materials Used in Integrated Circuit Manufacturing
Author(s):Lytle, Wayne M.
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
plasma assisted cleaning
electrostatic
nanometer scale
broad substrate cleaning technique
particulate contamination removal
Issue Date:2007
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96442
Rights Information:Copyright 2007 Wayne M. Lytle
Date Available in IDEALS:2017-07-06


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