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Title:A Novel Device for Energy Distribution Measurements in an RF Plasma Discharge
Author(s):Nguyen, Phi L.
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
energy distribution measurements
RF plasma discharge
ion energy distribution
RF capacitively coupled reactor
langmuir probe
capacitive probe
E x B cubical energy analyzer
Issue Date:1990
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96471
Rights Information:Copyright Martin John Neumann 2004
Date Available in IDEALS:2017-07-06


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