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Title:Measurements and Modeling of Ti and TiN Sputtering
Author(s):Ranjan, Rajiv
Discipline:Nuclear, Plasma, and Radiological Engineering
Degree:M.S. (master's)
Genre:Thesis
Subject(s):nuclear engineering
ti sputtering
tin sputtering
diffusion
barrier
layers
Al
Cu
metallization
physical vapor depostion
pvd
ion surface interaction experiement
IIAX
Issue Date:2000
Genre:Dissertation/Thesis
Type:Text
Language:English
URI:http://hdl.handle.net/2142/96508
Rights Information:Copyright 2000 Rajiv Ranjan
Date Available in IDEALS:2017-07-06


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