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Title:A fuzzy logic control system for a high temperature semiconductor furnace
Author(s):Buszkiewicz, Jim Raymond
Advisor(s):Uribe, Ricardo B.
Department / Program:Electrical & Computer Engineering
Discipline:Electrical & Computer Engineering
Degree Granting Institution:University of Illinois at Urbana-Champaign
Subject(s):Electrical engineering
Contactor control systems
Electric furnaces
Fuzzy logic
Issue Date:1994
Genre:Thesis
Language:English
URI:http://hdl.handle.net/2142/97986
Rights Information:Copyright 1994 held by Jim Raymond Buszkiewicz
Date Available in IDEALS:2017-09-29


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