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Title:Thermal Properties of Perforated Self-Rolled Silicon Nitride Membranes
Author(s):Michaels, Julian A.
Contributor(s):Li, Xiuling
Subject(s):Silicon nitride membrane
Self-rolled-up
Thermal annealing
Programmable fuse
Abstract:This thesis explores the thermal effects of perforations on silicon nitride (SiNx) self-rolled-up membranes, which are formed by self-assembly, utilizing compressive and tensile layers of SiNx. Tubular structures, lithographically defined with a variety of hole pattern designs, are exposed to several ranges of temperature using rapid thermal annealing (RTA) and electrical current. The shape deformation as a function of temperature is studied systematically. Using the observed thermal effects, an on-chip programmable fuse is presented as a potential device for power circuits.
Issue Date:2017-12
Genre:Other
Type:Text
Language:English
URI:http://hdl.handle.net/2142/99004
Date Available in IDEALS:2018-02-01


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