University of Illinois at Urbana-Champaign

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Showing 1–24 of 24 items
Thumbnail for Controlling Activation Energy to Wafers and Walls in Plasma Processing Reactors for Microelectronics Fabrication
Controlling Activation Energy to Wafers and Walls in Plasma Processing Reactors for Microelectronics Fabrication
Agarwal, Ankur

SUBMILLIMETER ABSORPTION SPECTROSCOPY IN SEMICONDUCTOR MANUFACTURING PLASMAS AND COMPARISON TO THEORETICAL MODELS
Helal, Yaser H.

Determining concentrations and temperatures in semiconductor manufacturing plasmas via submillimeter absorption spectroscopy
Helal, Yaser H.

DETERMINING THE CONCENTRATIONS AND TEMPERATURES OF PRODUCTS IN A CF4/CHF3/N2 PLASMA VIA SUBMILLIMETER ABSORPTION SPECTROSCOPY
Helal, Yaser H.

Thumbnail for Role of Indian NGOs in housing and development: A critical appraisal
Role of Indian NGOs in housing and development: A critical appraisal
Sen, Siddhartha

Thumbnail for Analysis of the Indian Vegetable Seed Industry
Analysis of the Indian Vegetable Seed Industry
Damle, Vivek Madhav

Thumbnail for Timed execution in distributed machine learning
Timed execution in distributed machine learning
Hashemi, Sayed Hadi

Thumbnail for Real-time Scheduling of Concurrent Transactions in Multi-domain Ring Buses
Real-time Scheduling of Concurrent Transactions in Multi-domain Ring Buses
Bui, Bach Duy; Pellizzoni, Rodolfo; Caccamo, Marco

Thumbnail for Exploiting cost-performance tradeoffs for modern cloud systems
Exploiting cost-performance tradeoffs for modern cloud systems
Rahman, Muntasir Raihan

Thumbnail for Controlling the emergent microstructures in template-directed eutectic solidification for optical applications
Controlling the emergent microstructures in template-directed eutectic solidification for optical applications
Kulkarni, Ashish Ajit

Thumbnail for Compilers for portable programming of heterogeneous parallel & approximate computing systems
Compilers for portable programming of heterogeneous parallel & approximate computing systems
Srivastava, Prakalp

Thumbnail for Transport in Low Pressure Plasma Reactors for Materials Processing
Transport in Low Pressure Plasma Reactors for Materials Processing
Vyas, Vivek

Thumbnail for Timing channels in traffic analysis
Timing channels in traffic analysis
Gong, Xun

Thumbnail for Radiation Transport in Low Pressure Plasmas: Lighting and Semiconductor Etching Plasmas
Radiation Transport in Low Pressure Plasmas: Lighting and Semiconductor Etching Plasmas
Rajaraman, Kapil

Thumbnail for Scheduling with privacy constraints
Scheduling with privacy constraints
Kadloor, Sachin

Thumbnail for Neuronal filopodia borne along tips and shafts of dendrites comprise two distinct populations as evidenced by differences in structure and dynamics
Neuronal filopodia borne along tips and shafts of dendrites comprise two distinct populations as evidenced by differences in structure and dynamics
Jain, Anika

Thumbnail for Surface Reaction Mechanisms for Plasma Processing of Semiconductors
Surface Reaction Mechanisms for Plasma Processing of Semiconductors
Sankaran, Arvind

Thumbnail for Entropy-based framework for combinatorial optimization problems and enabling the grid of the future
Entropy-based framework for combinatorial optimization problems and enabling the grid of the future
Baranwal, Mayank

Thumbnail for Exploiting software information for an efficient memory hierarchy
Exploiting software information for an efficient memory hierarchy
Komuravelli, Rakesh

Thumbnail for Learning-based inductive invariant synthesis
Learning-based inductive invariant synthesis
Garg, Pranav

Thumbnail for Continuous flow platforms for the synthesis of high-quality semiconductor nanocrystals
Continuous flow platforms for the synthesis of high-quality semiconductor nanocrystals
Kumar, Vivek

Thumbnail for Scheduling and resource allocation for clouds: novel algorithms, state space collapse and decay of tails
Scheduling and resource allocation for clouds: novel algorithms, state space collapse and decay of tails
Xie, Qiaomin

Thumbnail for Multiscale Simulation of Atmospheric Pressure Pulsed Discharges Used in Polymer Surface Functionalization
Multiscale Simulation of Atmospheric Pressure Pulsed Discharges Used in Polymer Surface Functionalization
Bhoj, Ananth N.

Thumbnail for iConference 2010 Proceedings
iConference 2010 Proceedings