2026-09-22T09:23:55Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/105279 2023-07-11 col_2142_5131 com_2142_5130

2019-08-23T20:48:28Z Chen, Sihan King, William P. 2019-08-23T20:48:28Z 2021-08-24T09:15:38Z 2015-07-20 2015-08 This thesis presents a method to experimentally calibrate the contact stiffness of an atomic force microscope (AFM) cantilever tip in contact with a surface, which is a critical step in the measurement of nano-mechanical properties. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). We present design, modeling, fabrication and characterization of a novel calibration sample, which consists of a series of rigid copper disks of varying diameter on top of a soft PDMS substrate. Larger disks produce larger contact stiffness, so a range of known contact stiffness is achieved with a range of metal disk sizes. Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2017-08-01 The student, Sihan Chen, accepted the attached license on 2015-07-20 at 12:25. The student, Sihan Chen, submitted this Thesis for approval on 2015-07-20 at 12:30. This Thesis was approved for publication on 2015-07-20 at 15:06. DSpace SAF Submission Ingestion Package generated from Vireo submission #8564 on 2019-08-22 at 16:17:27 Made available in DSpace on 2019-08-23T20:48:28Z (GMT). No. of bitstreams: 2 CHEN-THESIS-2015.pdf: 6219417 bytes, checksum: 75a40494676bd8a88e48fe34d262a351 (MD5) LICENSE.txt: 4207 bytes, checksum: 52757833f64aea36da1347489a607adc (MD5) Previous issue date: 2015-07-20 Embargo set by: Seth Robbins for item 112401 Lift date: 2021-08-23T20:48:32Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system Limited Restriction Lifted for Item 112401 on 2021-08-24T09:15:38Z. application/pdf http://hdl.handle.net/2142/105279 en Copyright 2015 by Sihan Chen. All rights reserved. contact stiffness AFM calibration Design, modeling and fabrication of contact stiffness calibration samples for CR-AFM text text Mechanical Sci & Engineering Mechanical Engineering University of Illinois at Urbana-Champaign Thesis M.S.