<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-20T11:50:37Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/106487" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/106487</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_8888</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_8887</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:description>Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2021-12-01</dc:description>
          <dc:description>The student, Wonsik Choi, accepted the attached license on 2019-12-04 at 16:02.</dc:description>
          <dc:description>The student, Wonsik Choi, submitted this Dissertation for approval on 2019-12-04 at 16:32.</dc:description>
          <dc:description>This Dissertation was approved for publication on 2019-12-05 at 17:27.</dc:description>
          <dc:description>DSpace SAF Submission Ingestion Package generated from Vireo submission #14698 on 2020-02-28 at 17:37:56</dc:description>
          <dc:contributor>Li, Xiuling</dc:contributor>
          <dc:contributor>Li, Xiuling</dc:contributor>
          <dc:contributor>Lyding, Joseph W</dc:contributor>
          <dc:contributor>Lee, Minjoo L</dc:contributor>
          <dc:contributor>Nam, Sungwoo</dc:contributor>
          <dc:creator>Choi, Wonsik</dc:creator>
          <dc:date>2020-03-02T22:38:57Z</dc:date>
          <dc:date>2020-03-02T22:38:57Z</dc:date>
          <dc:date>2022-03-03T10:15:22Z</dc:date>
          <dc:date>2019-12-05</dc:date>
          <dc:date>2019-12</dc:date>
          <dc:description>Bottom-up grown III-V compound semiconductor nanowires (NWs) provide a novel building block for electrical and optical devices. Bottom-up III-V NWs can be synthesized by either a vapor-liquid-solid (VLS) or selective area epitaxy (SAE) mechanism. Under the specific VLS NW growth conditions, planar self-aligned NWs can be grown on top of a substrate under a selective lateral epitaxy (SLE) mechanism.
In this thesis research, first, the realization of lateral multiple p-n junction gallium arsenide (GaAs) SLE NW grown by metal-organic chemical vapor deposition (MOCVD) reactor is presented. Scanning microwave impedance microscopy (sMIM) and infrared scattering-type near-field optical microscopy (IR-SNOM) scans on top of the NW suggested that p-type zinc dopants are accumulated at twin-plane boundaries of NW. The electrical properties of the SLE GaAs lateral p-n junction were analyzed by measuring two-terminal I-V characteristics of arrays of p-n NW diodes. The I-V characteristics of the devices indicated that the lateral p-n junction was successfully realized with a high rectification ratio of ~106.
The gallium phosphide (GaP) SAE NW growth on top of a silicon (Si) substrate will be also introduced. Systemic studies were performed by modulating the following three NW growth conditions: TMGa flow rate, growth temperature, and V/III ratio. By controlling the NW growth parameters, a 97.5% yield of hexagonal NWs was grown on an area of 400 µm × 400 µm. The morphology of the NWs was inspected with a scanning electron microscope (SEM). X-ray diffraction (XRD) analysis was performed on the GaP NWs, and 6.3016 Å of wurtzite (WZ) GaP c-lattice parameter was extracted. Vertical arrays of GaP p-n and p-i-n NW diodes were fabricated. The ideality factor and rectification ratio of p-n GaP NW diode were measured 7 and 10, respectively. The ideality factor and the rectification ratio could be improved to 3.7 and 1000 by introducing an undoped intrinsic layer between n-type and p-type GaP NW.</dc:description>
          <dc:description>Made available in DSpace on 2020-03-02T22:38:57Z (GMT). No. of bitstreams: 2
CHOI-DISSERTATION-2019.pdf: 3280922 bytes, checksum: c9f9f184126f776689131ca7fcac93a1 (MD5)
LICENSE.txt: 4208 bytes, checksum: 00aae9612f680c13e3420a5fc4938848 (MD5)
  Previous issue date: 2019-12-05</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 114031
Lift date: 2022-03-02T22:39:04Z
Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system</dc:description>
          <dc:description>Limited Restriction Lifted for Item 114031 on 2022-03-03T10:15:22Z.</dc:description>
          <dc:format>application/pdf</dc:format>
          <dc:identifier>http://hdl.handle.net/2142/106487</dc:identifier>
          <dc:language>en</dc:language>
          <dc:rights>"Chapter 2 was reproduced with the permission from [W. Choi et al., ""Direct electrical probing of periodic modulation of zinc-dopant distributions in planar gallium arsenide nanowires,"" ACS Nano, vol. 11, no. 2, pp. 1530-1539, 2017.] Copyright [2017] American Chemical Society."</dc:rights>
          <dc:subject>semiconductor nanowire</dc:subject>
          <dc:subject>selective lateral epitaxy</dc:subject>
          <dc:subject>selective area epitaxy</dc:subject>
          <dc:subject>sMIM</dc:subject>
          <dc:subject>IR-sSNOM</dc:subject>
          <dc:title>Bottom-up growth of III-V compound semiconductor nanowires by selective lateral/area epitaxy</dc:title>
          <dc:type>text</dc:type>
          <dc:type>text</dc:type>
          <degree>
            <department>Electrical &amp; Computer Eng</department>
            <discipline>Electrical &amp; Computer Engr</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
