2026-09-23T06:10:24Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/108712 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Gong, Songbin Gao, Liuqing 2020-10-07T22:50:01Z 2020-10-07T22:50:01Z 2022-10-07T22:50:13Z 2020-07-20 2020-08 As the sub-6G spectrum becomes overcrowded with applications, the research community has begun to explore beyond 6 GHz for new spectral venues to advance wireless capabilities. Acoustic filters are indispensable front-end components in telecommunication, which is challenging to scale to higher frequencies. Frequency scaling without compromising performance remains challenging due to various technical bottlenecks in material integration, device fabrication, and filter design for acoustic filters. This thesis presents the design approach as well as the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small size and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter are also presented in this thesis, which allows this technology to be applied for filters with different center frequencies and FBWs. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system-level. The fabricated filter is built with the seventh-order antisymmetric Lamb wave mode (A7) resonators with an electromechanical coupling of 0.7%. The measurements show a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm2. Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2022-08-01 The student, Liuqing Gao, accepted the attached license on 2020-07-16 at 10:19. The student, Liuqing Gao, submitted this Thesis for approval on 2020-07-16 at 10:28. This Thesis was approved for publication on 2020-07-20 at 09:18. DSpace SAF Submission Ingestion Package generated from Vireo submission #15652 on 2020-10-02 at 15:51:11 Made available in DSpace on 2020-10-07T22:50:01Z (GMT). No. of bitstreams: 2 GAO-THESIS-2020.pdf: 2615417 bytes, checksum: b3d913f2f24b09b4c253a58d34a8d1ff (MD5) LICENSE.txt: 4208 bytes, checksum: 039e115e53ff4146385026b05307b52a (MD5) Previous issue date: 2020-07-20 Embargo set by: Seth Robbins for item 116341 Lift date: 2022-10-07T22:50:13Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system Author requested closed access (OA after 2yrs) in Vireo ETD system Limited application/pdf http://hdl.handle.net/2142/108712 en Copyright 2020 Liuqing Gao microelectromechanical systems millimeter-wave devices piezoelectric devices K-band K-band lithium niobate microelectromechanical system hybrid filters text Thesis Electrical & Computer Eng Electrical & Computer Engr University of Illinois at Urbana-Champaign Thesis M.S.