2026-09-20T17:20:54Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/113227 2023-07-11 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

Ferreira, Placid M Maduzia, Joseph Walter 2022-01-12T22:35:21Z 2022-01-12T22:35:21Z 2024-01-12T22:35:30Z 2021-07-23 2021-08 Electrohydrodynamic jet printing facilitates the deposition of 500nm-30um droplets with high positional accuracy. The University of Illinois at Urbana-Champaign, UIUC, has developed this technique and shown it has many capabilities. Whether the goal is to pattern biologically active chemicals, draw an etch mask, connect complex geometry microscale wires, or one of many other applications, EJET has a place in R&D. Significant effort or training is required to write 500nm-30um droplets, let alone to coalesce droplets into shapes/lines. This thesis includes work to identify how to go beyond the droplet to develop reproducible printed lines and shapes. A detailed procedure for use of the EJET instrument, as well as a qualitative explanation of the EJET process is detailed here. Surface charge dissipation and sample surface preparation were key factors to transition from droplet to line/area writing. Lessons learned for future generations of EJET researchers are documented here. The EJET was used to print inks that were solidified by a novel technique for interesting applications in microfabrication. First chemical compatibility was tested with the solidified ink. Then, the application of the solidified ink as a metal film etch mask and a CF4 isotropic etch mask were explored. With the combination of EJET understanding and this new ink solidification technique, there is a whole new world of potential EJET research. Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2023-08-01 The student, Joseph Maduzia, accepted the attached license on 2021-07-22 at 15:38. The student, Joseph Maduzia, submitted this Thesis for approval on 2021-07-22 at 15:46. This Thesis was approved for publication on 2021-07-23 at 13:39. DSpace SAF Submission Ingestion Package generated from Vireo submission #17069 on 2022-01-12 at 12:55:36 Made available in DSpace on 2022-01-12T22:35:21Z (GMT). No. of bitstreams: 2 MADUZIA-THESIS-2021.pdf: 10509184 bytes, checksum: 0c720cfd27b10adb8c2d3bf26125da85 (MD5) LICENSE.txt: 4211 bytes, checksum: 29b3b25d22dd5680c4fc77fdfa88496b (MD5) Previous issue date: 2021-07-23 Embargo set by: Seth Robbins for item 121153 Lift date: 2024-01-12T22:35:30Z Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system U of I Only application/pdf http://hdl.handle.net/2142/113227 en Copyright 20210 Joseph W Maduzia Electrohydrodynamic Electrohydrodynamic-jet (E-jet) Electrohydrodynamic-Jet Printing ink film printing 172nm Exposure Electrohydrodynamics Microelectromechanical Systems MNMS Cleanroom Micromanufacturing Electrohydrodynamic jet printing: droplet to shape writing, and potential applications with 172nm exposure text Thesis Mechanical Sci & Engineering Mechanical Engineering University of Illinois at Urbana-Champaign Thesis M.S.