2026-09-21T23:51:52Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/113903 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Vlasov, Yurii A 2022-04-29T21:34:49Z 2021-12 Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2022-04-06 without embargo terms The student, Prasoon Jha, accepted the attached license on 2021-12-02 at 11:10. The student, Prasoon Jha, submitted this Thesis for approval on 2021-12-02 at 11:16. This Thesis was approved for publication on 2021-12-06 at 10:26. DSpace SAF Submission Ingestion Package generated from Vireo submission #17358 on 2022-04-06 at 17:10:47 Made available in DSpace on 2022-04-29T21:34:49Z (GMT). No. of bitstreams: 2 JHA-THESIS-2021.pdf: 1904732 bytes, checksum: 5c23535c171d215a8ff27f15bf4b0342 (MD5) LICENSE.txt: 4208 bytes, checksum: 9a766dc96b21711c7b36b2927b54fcf1 (MD5) Previous issue date: 2021-12-06 application/pdf en text Design and fabrication of grating couplers Jha, Prasoon 2021-12-06 Engineering 2022-04-29T21:34:49Z A silicon neural probe enables the monitoring of chemical dynamics with high spatial and temporal resolution and good chemical sensitivity and selectivity while causing less tissue damage than conventional micro-dialysis probes. Neural activity can be optically stimulated using optogenetics, which can be enabled using an off-chip light source and an optical grating coupler. In this thesis, we discuss the design and fabrication of waveguides and grating couplers, which can be used as a foundation for light delivery systems for various biological applications. Chapter 2 provides some background knowledge on waveguides and grating couplers, the design of which is described in Chapter 3. Chapter 4 covers the fabrication process, and Chapter 5 contains some concluding remarks and possible next steps. Thesis eng http://hdl.handle.net/2142/113903 Copyright 2021 Prasoon Jha Electrical & Computer Eng Electrical & Computer Engr University of Illinois at Urbana-Champaign Thesis M.S.