2026-09-22T03:41:16Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/117543 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Gong, Songbin Gong, Songbin Jin, Jianming Goddard, Lynford L. Zhou, Jin 2022-12 application/pdf en text Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2024-12-01 The student, Liuqing Gao, accepted the attached license on 2022-10-27 at 15:53. The student, Liuqing Gao, submitted this Dissertation for approval on 2022-10-27 at 16:22. This Dissertation was approved for publication on 2022-10-31 at 12:02. DSpace SAF Submission Ingestion Package generated from Vireo submission #18542 on 2023-04-12 at 11:34:46 Advancing acoustic devices towards mmwave Gao, Liuqing 2022-10-31 Microelectromechanical Systems Millimeterwave Devices Piezoelectric Devices As the sub-6G spectrum becomes overcrowded with applications, the research community has begun to explore beyond 6 GHz for new spectral venues to advance wireless capabilities. Acoustic filters are indispensable front-end components in telecommunication, and it is challenging to scale acoustic filters to higher frequencies. Frequency scaling without compromising performance remains challenging due to various technical bottlenecks in material integration, device fabrication, and filter design for acoustic filters. This dissertation presents the design approach as well as the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of electromagnetic (EM) and acoustic to attain wide bandwidth while keeping the advantages of small size and high Q in the acoustic domain. The performance trade space and design flow of the hybrid filter, which allow this technology to be applied to filters with different center frequencies and FBWs, are also presented in this dissertation. The hybrid filter is simulated by hybridizing the EM and acoustic finite element analysis, which are carried out separately and combined at a system level. At high frequencies beyond 10 GHz, the influence of substrate loss on device performance becomes increasingly significant. By characterizing the loss in several commonly used dielectric-on-Si substrates, a hybrid filter with improved performance due to reduced substrate loss is demonstrated. Thesis eng https://hdl.handle.net/2142/117543 Copyright 2022 Liuqing Gao Ph.D. Dissertation Electrical & Computer Engr University of Illinois at Urbana-Champaign Electrical & Computer Eng