2026-09-23T21:55:15Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/120462 2023-09-05 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

https://hdl.handle.net/2142/120462 Pandey, Sanat Process development and fabrication of photonic crystal based III-V semiconductor optical sources Semiconductor laser diodes play a vital role in modern technology- in such applications as facial recognition and high-speed data transmission for which efficient operation in single mode emission is desired. Vertical Cavity Surface Emitting Laser (VCSEL) diodes are at the forefront for these applications and there has been significant development in VCSEL technology over the years. It is essential to maintain the single mode properties of VCSELs while also increasing power and efficiency. Photonic Crystal Surface Emitting Lasers (PCSELs) are promising sources for single mode high power and high brightness applications. The aim of this thesis is to develop fabrication techniques for advanced VCSEL and PCSEL device manufacture. The photolithography, hard mask etches, and III-V etch processes have been used and modified to attain more controllability over the PhC definition and dimensions. Moreover, for high power and mode control of the light emitted, InP based PCSEL process development and fabrication was done. A high index contrast structure was designed, and a material science test was carried out to see the feasibility of the structure. Photonic crystal, VCSEL, PCSEL Choquette, Kent D 2023-05 2023-05-05 application/pdf en text Thesis Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2025-05-01 The student, Sanat Pandey, accepted the attached license on 2023-05-03 at 18:27. The student, Sanat Pandey, submitted this Thesis for approval on 2023-05-03 at 18:36. This Thesis was approved for publication on 2023-05-05 at 10:37. DSpace SAF Submission Ingestion Package generated from Vireo submission #19328 on 2023-09-01 at 17:16:03 Copyright 2023 Sanat Pandey M.S. Thesis Electrical & Computer Engr University of Illinois at Urbana-Champaign Electrical & Computer Eng