2026-09-21T17:17:41Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/121382 2023-12-13 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

van der Zande, Arend M Ertekin, Elif 2023-08 application/pdf en text Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2025-08-01 The student, Kelly Hwang, accepted the attached license on 2023-07-21 at 10:27. The student, Kelly Hwang, submitted this Thesis for approval on 2023-07-21 at 10:36. This Thesis was approved for publication on 2023-07-21 at 14:15. DSpace SAF Submission Ingestion Package generated from Vireo submission #19770 on 2023-12-04 at 17:18:54 Interfacial mechanics of strain engineering in thin film capped two-dimensional materials Hwang, Kelly 2023-07-21 Strain Engineering Two-dimensional Materials Heterogeneous Integration Finite Element Modelling Cmos Processes Spatially varying strains in thin film capped monolayer MoS2 are observed using Raman spectroscopy. We apply a traction-separation model to define the interfacial mechanics which affect the strain distribution. The model is used in finite element analysis (FEA) to directly reveal interfacial mechanisms of strain transfer between the stressor and the two-dimensional material. The developed finite element model accurately reproduces the strain distribution for various stressor geometries observed in experiments, suggesting opportunities to use the model for design and prediction of strains. We also explore the anisotropy of the strain distribution by examining directional strains. Text eng https://hdl.handle.net/2142/121382 Copyright 2023 Kelly Hwang M.S. Thesis Mechanical Engineering University of Illinois at Urbana-Champaign Mechanical Sci & Engineering