2026-09-21T23:32:39Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/129639 2026-02-10 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

application/pdf en text Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01 The student, Michael Jamrozy, accepted the attached license on 2025-05-09 at 14:27. The student, Michael Jamrozy, submitted this Thesis for approval on 2025-05-09 at 14:32. This Thesis was approved for publication on 2025-05-09 at 14:38. DSpace SAF Submission Ingestion Package generated from Vireo submission #22242 on 2025-10-19 at 19:17:10 Microplasma jet devices in quartz Jamrozy, Michael Brandon 2025-05-09 Eden, J. Gary Microplasma Room-temperature Plasma Plasma Jet Device Sterilization eng A microplasma jet device provides an efficient way of generating reactive species for the purpose of inactivating microbes. Such devices operate at room temperature and atmospheric pressure and may be used to sterilize medical equipment, treat infections, and disinfect the surface of food. This thesis discusses the fabrication of microplasma jet devices fabricated in fused silica. Previous research has demonstrated successful operation of the microplasma jet devices fabricated from polymers, including materials suitable for 3D printing or micro-molding. However, there are concerns about the long-term sustainability of microplasmas in these materials due to plasma-induced reactivity (such as sputtering) and thermal degradation. The chemical resistivity of fused silica makes it an ideal material to build a practical, long-lasting microplasma jet device. 2025-05 Text https://hdl.handle.net/2142/129639 Copyright 2025 Michael Jamrozy Electrical & Computer Eng Electrical & Computer Engr University of Illinois Urbana-Champaign M.S. Thesis