2026-09-18T20:14:22Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/14618 2023-07-10 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

King, William P. King, William P. Corbin, Elise Anne 2010-01-06T16:19:50Z 2010-01-06T16:19:50Z 2010-01-06T16:19:50Z 2009-12 This thesis aims to characterize microcantilevers with integrated heater-thermometers. This research concentrates on characterization for use in data storage, sensing, surface science, and nano-manufacturing. The rst objective seeks to understand the speci c thermal interactions between a heated microcantilever tip and various substrates. The experiments investigate thermal conductance, thermal time constant, and temperature-dependant adhesion force between and cantilever tip and substrates of silicon, quartz, and polyimide. The second objective is to utilize a heated microcantilever as a heater-thermometer. The experiments investigate the thermal calibration sensitivity and resolution under steady and periodic conditions near room-temperature. The results were compared to the Raman spectroscopy, which measures the local temperature at the cantilever tip. Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2009-11-02T22:51:09Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 corbin_elise.pdf: 683379 bytes, checksum: 84f91ce789f2c8523b1ba111383640fc (MD5) uiucthesis.zip: 6923212 bytes, checksum: 6b31ec22b6f5672528e106e39c31560c (MD5) Made available in DSpace on 2010-01-06T16:19:50Z (GMT). No. of bitstreams: 3 license.txt: 4062 bytes, checksum: b24708511d4d4d076968676216f5a404 (MD5) corbin_elise.pdf: 683379 bytes, checksum: 84f91ce789f2c8523b1ba111383640fc (MD5) elise_corbin.pdf: 2608066 bytes, checksum: add6370b92948767a2c6d57ac89cf5e2 (MD5) http://hdl.handle.net/2142/14618 en Copyright 2009 Elise A. Corbin Atomic Force Microscopy (AFM) cantilever Heated microcantilevers Temperature Sensitivity Resolution Raman Spectroscopy Substrate dependance, temperature dependance and temperature sensitivity and resolution of doped-silicon microcantilevers Mechanical Sci & Engineering 1917 Mechanical Engineering 0133 University of Illinois at Urbana-Champaign Thesis M.S. MS:Mechanical Engineering -UIUC 10KS0133MS