2026-09-21T08:06:31Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/15971 2023-07-10 col_2142_8888 col_2142_5131 com_2142_8887 com_2142_234 com_2142_5130

Microplasma Silicon microplasma device microlaser microjet Silicon microcavity and microchannel plasma devices: spectroscopy and time-resolved optical experiments Eden, James G. Kim, Taek-Lim 2010-05-18T18:53:01Z 2010-05-18T18:53:01Z 2012-05-19T10:00:12Z 2010-05-18T18:53:01Z Novel microcavity and microchannel plasma devices in Si have provided new and efficient sources of visible, ultraviolet (UV) and vacuum ultraviolet (VUV) radiation. The realization of this new platform for devices is implemented through VLSI and MEMS fabrication techniques. In this thesis, the basic physics of plasma discharges is presented, and the performance of Si microplasma devices with inverted pyramidal cavity and V-grooved channel configurations is described in some detail. Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2010-04-13T17:29:47Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 1 Kim_Taek-Lim.pdf: 1255179 bytes, checksum: 7acdd44ef72bc584b01d884b4c060c80 (MD5) Made available in DSpace on 2010-05-18T18:53:01Z (GMT). No. of bitstreams: 2 Kim_Taek-Lim.pdf: 1255179 bytes, checksum: 7acdd44ef72bc584b01d884b4c060c80 (MD5) license.txt: 4055 bytes, checksum: 02afffd4dd6a8108d2124ca5886fa89d (MD5) Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by William Ingram (wingram2@illinois.edu) on 2010-05-18T18:54:48Z Item is restricted until 2012-05-18T18:54:47Z Item reinstated by Sarah Shreeves (sshreeve@illinois.edu) on 2012-05-19T10:00:12Z Item was in collections: Dissertations and Theses - Electrical and Computer Engineering (ID: 446) University of Illinois Dissertations and Theses (ID: 204) No. of bitstreams: 3 Kim_Taek-Lim.pdf.txt: 39651 bytes, checksum: 4e37cf69e1628bfe6425c89bc6d56f16 (MD5) Kim_Taek-Lim.pdf: 1255179 bytes, checksum: 7acdd44ef72bc584b01d884b4c060c80 (MD5) license.txt: 4055 bytes, checksum: 02afffd4dd6a8108d2124ca5886fa89d (MD5) Item released from any restrictions by Sarah Shreeves (sshreeve@illinois.edu) on 2012-05-19T10:00:12Z http://hdl.handle.net/2142/15971 en Copyright 2010 Taek-Lim Kim 2010-5 Electrical & Computer Eng 1933 Electrical & Computer Engr 1200 University of Illinois at Urbana-Champaign Thesis M.S. MS:Electr & Computer Eng-UIUC 10KS1200MS