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Petrov, Ivan G. Greene, Joseph E. Petrov, Ivan G. Rockett, Angus A. Zuo, Jian-Min Howe, Brandon M. 2011-01-14T22:46:47Z 2011-01-14T22:46:47Z 2011-01-14T22:46:47Z Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2010-12-02T17:37:03Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 1 Howe_Brandon.pdf: 35213703 bytes, checksum: 4339e1bf08b5bebc6922899d61292b4e (MD5) Made available in DSpace on 2011-01-14T22:46:47Z (GMT). No. of bitstreams: 2 Howe_Brandon.pdf: 34631915 bytes, checksum: 80b8eba2348611d491d411cd0e111bc6 (MD5) license.txt: 4059 bytes, checksum: d0d9d67af46d913e621aef03b2d44f8b (MD5) http://hdl.handle.net/2142/18339 en Copyright 2010 Brandon Marcus Howe hafnium aluminum nitride (HfAlN) hard coatings thin films sputtering nanostructure Growth, physical properties, and nanostructuring of epitaxial metastable hafnium aluminum nitride 2010-12 Materials Science & Engineerng 1919 Materials Science & Engr 0130 University of Illinois at Urbana-Champaign Dissertation Ph.D. PHD:Materials Sci & Engr -UIUC 10KS0130PHD