2026-09-20T08:08:27Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/24131 2023-07-10 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

King, William P. Somnath, Suhas 2011-05-25T14:51:26Z 2011-05-25T14:51:26Z 2011-05-25T14:51:26Z 2011-05 This thesis reports thermal nanotopography sensing using a heated atomic force microscope cantilever with a sensitivity as high as 4.68 mV/nm, which is two orders of magnitude higher than previously published results for heated cantilevers. The sensitivity improvement arises from closed-loop control of cantilever temperature during the topography sensing. The cantilever temperature is controlled by maintaining constant electrical resistance, current, power, or voltage across either the entire electrical circuit or individual components of the circuit. A model that links the cantilever heat flow and temperature-dependent cantilever properties to the circuit behavior in order to predict and then optimize the cantilever topography sensitivity was developed. Topography measurements on a 100 nm tall silicon grating show cantilever sensitivity ranging 0.047 to 4.68 mV/nm, depending on the control scheme. The application of closed loop control yields a topography sensitivity that is 100X increased over previously published work on heated cantilevers. Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2011-03-03T21:50:42Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Somnath_Suhas.docx: 1212534 bytes, checksum: 0fbb6b717b9c5f7431a2a5913f52aa97 (MD5) Somnath_Suhas.pdf: 3974196 bytes, checksum: aaed6ea7e13c0fd2939c097298ea3ad5 (MD5) Made available in DSpace on 2011-05-25T14:51:26Z (GMT). No. of bitstreams: 3 Somnath_Suhas.pdf: 3974248 bytes, checksum: e01fb5f8d5dd0a10308b8a9811154173 (MD5) license.txt: 4063 bytes, checksum: 2bf5c55b563ef33ca478b22d026980c6 (MD5) Somnath_Suhas.docx: 1212738 bytes, checksum: 94f8972380c9af79275fe5c5541b2e8b (MD5) http://hdl.handle.net/2142/24131 en Copyright 2011 Suhas Somnath Atomic Force Microscopy (AFM) cantilever nanotopography temperature control sensitivity Improved nanotopography sensing via temperature control of a heated atomic force microscope cantilever Mechanical Sci & Engineering 1917 Mechanical Engineering 0133 University of Illinois at Urbana-Champaign Thesis M.S. PHD:Mechanical Enginerng -UIUC 10KS0133PHD