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oai:www.ideals.illinois.edu:2142/26151 2023-07-10 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

Salapaka, Srinivasa M. Zhang, Xuemeng 2011-08-25T22:16:24Z 2011-08-25T22:16:24Z 2011-08-25T22:16:24Z 2011-08 This work is aimed at developing a control-system theoretic approach for addressing certain performance issues that arise in micro-electro-mechanical systems (MEMS). In particular, it focuses on applications such as nano-positioning, where control design becomes necessary to meet high resolution, bandwidth, and reliability (robustness) demands especially when there is significant model uncertainty and instrumentation noise. In this article, a systematic control design from robust control approach is demonstrated on a micro probing device with electrically separated sensing combs and driving combs. The system is identified through experimental input-output data and the hardware is setup in such a way that the resulting model is a linear time-invariant model with appropriate choice of variables even when the the underlying constitutive laws are nonlinear. Controllers are developed based on PID and H∞ control design methodologies. Control algorithms from PID control and robust control have been implemented on dSpace digital processing platform. The implemented control (H∞) design demonstrates a significant (≈ 400%) improvement in the bandwidth, where the bandwidths from the closed-loop sensitivity and complementary-sensitivity functions respectively are 68 Hz and 74 Hz. A significant improvement in reliability and repeatability (robustness to uncertainties) as well as noise attenuation is also demonstrated through this design. Item withdrawn by Rebecca Bryant (rabryant@illinois.edu) on 2011-07-13T14:06:59Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 1 Zhang_Xuemeng.pdf: 1728073 bytes, checksum: d54f21e4189541c97469d5afd9246991 (MD5) Made available in DSpace on 2011-08-25T22:16:24Z (GMT). No. of bitstreams: 2 Zhang_Xuemeng.pdf: 1728036 bytes, checksum: 19a63613bd11b5a6d57a069d91a78497 (MD5) license.txt: 4063 bytes, checksum: 1ef8a5e1a08f2aa1b3c4050b4daf799a (MD5) http://hdl.handle.net/2142/26151 en Copyright 2011 by Xuemeng Zhang. All rights reserved. micro-electro-mechanical systems (MEMS) electrostatic comb drive nanopositioning system identification H∞ control. Advanced control of MEMS probing devices Mechanical Engineering 0133 Mechanical Sci & Engineering 1917 University of Illinois at Urbana-Champaign Thesis M.S. MS:Mechanical Engineerng -UIUC 10KS0133MS