2026-09-21T17:58:41Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/34514 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Eden, James G. Kim, Eung Soo 2012-09-18T21:23:30Z 2012-09-18T21:23:30Z 2014-09-18T10:00:56Z 2012-08 2012-09-18T21:23:30Z 2012-08 In plasma science, the ability to confine plasma in cavities with characteristic dimensions less than 1 μm would represent a major milestone. In this thesis, realization of microplasma inside channel devices with the characteristic dimensions of 5 μm and 2.5 μm is discussed. Data collected during the characterization of 5 μm devices are consistent with Paschen’s curve. Operating devices with a characteristic dimension of 2.5 μm are also introduced in this thesis. Finally, a few potential strategies for creating “nanoplasma” devices are discussed. Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2012-07-03T13:34:17Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Kim_Eung Soo.docx: 3695449 bytes, checksum: f9b9f9d198b24c0df48db84e86b22a8b (MD5) Kim_Eung Soo.pdf: 1053742 bytes, checksum: a8fd09d2d644fa69abc4cd2624d0f250 (MD5) Made available in DSpace on 2012-09-18T21:23:30Z (GMT). No. of bitstreams: 3 Kim_Eung Soo.pdf: 1053742 bytes, checksum: a8fd09d2d644fa69abc4cd2624d0f250 (MD5) license.txt: 4056 bytes, checksum: 4cc1a97ea68d3c502b2bcb5a59682f01 (MD5) Kim_Eung Soo.docx: 3695449 bytes, checksum: f9b9f9d198b24c0df48db84e86b22a8b (MD5) Item marked as restricted to the 'Administrator' Group (id=1) by Seth Robbins (srobbins@illinois.edu) on 2012-09-18T21:27:16Z Item is restricted until 2014-09-18T21:27:16Z Restriction data tranferred 2014-07-01T11:35:41-05:00 Original Data Group with Access Administrator Release Date: 2014-09-18 16:27:16 UTC Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system Limited Restriction Lifted for Item 34788 on 2014-09-18T10:00:55Z. http://hdl.handle.net/2142/34514 en Copyright 2012 Eung Soo Kim microplasma nanoplasma Paschen's curve pd curve Confinement of microplasma in silicon trenches with widths as small as 2.5 μm Electrical & Computer Eng 1933 Electrical & Computer Engr 1200 University of Illinois at Urbana-Champaign Thesis M.S. MS:Electr & Computer Eng-UIUC 10KS1200MS