<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-24T04:44:07Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/42357" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/42357</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_13836</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_13835</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:contributor>Rockett, Angus A.</dc:contributor>
          <dc:creator>Mei, Antonio Rodolph</dc:creator>
          <dc:date>2013-02-03T19:36:18Z</dc:date>
          <dc:date>2013-02-03T19:36:18Z</dc:date>
          <dc:date>2012-12</dc:date>
          <dc:date>2013-02-03T19:36:18Z</dc:date>
          <dc:date>2012-12</dc:date>
          <dc:description>Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2012-10-15T19:00:24Z
Item was in collections:
University of Illinois Theses &amp; Dissertations (ID: 1)
No. of bitstreams: 1
Master Dissertation.pdf: 23101363 bytes, checksum: c35d98278c93a599d3b071276046859a (MD5)</dc:description>
          <dc:description>Made available in DSpace on 2013-02-03T19:36:18Z (GMT). No. of bitstreams: 2
Antonio Rodolph_Mei.pdf: 23112933 bytes, checksum: ca9d3b455e35a2dac7a8c1eb0adb57a3 (MD5)
license.txt: 4066 bytes, checksum: fba6dd47a1e0f78c526fa752b08c456f (MD5)</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/42357</dc:identifier>
          <dc:language>en</dc:language>
          <dc:rights>Copyright 2012 Antonio Rodolph Mei</dc:rights>
          <dc:subject>transition metal nitride</dc:subject>
          <dc:subject>metastable alloy</dc:subject>
          <dc:subject>spinodal decomposition</dc:subject>
          <dc:subject>nanostructure</dc:subject>
          <dc:subject>ion bombardment</dc:subject>
          <dc:subject>reactive magnetron sputtering</dc:subject>
          <dc:title>Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <department>Materials Science &amp; Engineerng</department>
            <departmentCode>1919</departmentCode>
            <discipline>Materials Science &amp; Engr</discipline>
            <disciplineCode>0130</disciplineCode>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Thesis</level>
            <name>M.S.</name>
            <program>MS:Materials Sci &amp; Engr -UIUC</program>
            <programCode>10KS0130MS</programCode>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
