2026-09-22T17:49:48Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/44109 2023-07-11 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

King, William P. Liu, Joseph 2013-05-24T21:50:59Z 2013-05-24T21:50:59Z 2013-05 2013-05-24T21:50:59Z 2013-05 This thesis reports thermal nanotopography sensing with an atomic force microscope using a high-resistivity (HR) heated cantilever and a previously studied low-resistivity (LR) heated cantilever, with respective heater doping concentrations of 1 x 10^16 cm^-3 and 3 x 10^17 cm^-3. The HR cantilever temperature sensitivity on a 100 nm tall silicon grating improves by more than two times compared to the LR cantilever sensitivity in the range 100ºC – 300ºC. The HR cantilever achieves a sensitivity of 0.37 mV/nm at 300 ºC, compared to 0.15 mV/nm using the LR cantilever. The higher sensitivity can be attributed to the temperature coefficient of resistance of the HR cantilever having a value of 0.102 C^-1, a 13X increase over the LR cantilever value of 0.008 C^-1. The HR cantilever is shown to be better-suited than the LR cantilever for potential metrology applications, by thermally imaging a temperature-sensitive material, a 110 nm tall photoresist grating (AZ1518). Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2013-04-24T22:02:01Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 Liu_Joseph.docx: 3644411 bytes, checksum: bf812a6ec3c6814700d66e5cfe76d7a0 (MD5) Liu_Joseph.pdf: 1342625 bytes, checksum: 35389c9fa897ce5093b20718a0e9edcc (MD5) Made available in DSpace on 2013-05-24T21:50:59Z (GMT). No. of bitstreams: 3 Joseph_Liu.pdf: 1342515 bytes, checksum: 75e6ec03db0865dfa81a97e4bd2d2e26 (MD5) Liu_Joseph.docx: 3643140 bytes, checksum: 3954531bb80566d438ef9a7d0370a792 (MD5) license.txt: 4058 bytes, checksum: d1975a7e7b3e974718c086c2100cd732 (MD5) http://hdl.handle.net/2142/44109 en Copyright 2013 Joseph Liu Atomic-force microscope (AFM) cantilever nanotopography Heated atomic force microscope cantilever with high resistivity and improved temperature sensitivity for nanotopography sensing text Mechanical Sci & Engineering 1917 Mechanical Engineering 0133 University of Illinois at Urbana-Champaign Thesis M.S. MS:Mechanical Engineerng -UIUC 10KS0133MS