2026-09-23T07:41:56Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/45540 2023-07-11 col_2142_5131 col_2142_13836 com_2142_5130 com_2142_13835 com_2142_234

Braun, Paul V. Kim, Ha Seong 2013-08-22T16:47:08Z 2013-08-22T16:47:08Z 2015-08-22T10:00:34Z 2013-08 2013-08-22T16:47:08Z 2013-08 Advance in nanotechnology has made a good understanding of high frequency phonon dominant, nanometer scale thermal transport a necessity. To study nanometer-scale thermal transport in three dimensions, three-dimensional nanostructured materials are needed. In this work, fabrication of sub 100 nanometer periodic dielectric three-dimensional structures and epitaxial nanostructures are discussed. Using self-assembly of colloidal silica particles as a template, various dielectrics of interest were filled to create nanostructured dielectric materials. First, sub-100 nanometer silica nanoparticles were synthesized and used to assemble a colloidal crystal template, opals. Static silicon chemical vapor deposition filled the above templates with amorphous silicon and thermal annealing converted the amorphous silicon to polycrystalline silicon with an average grain size of 10 nanometers. Subsequent etching with dilute ethanolic hydrofluoric acid yielded periodic three-dimensional polycrystalline silicon nanostructures with characteristic skeleton size of around 20 nanometers. Using a similar colloidal crystal template made of 400 nanometer sized silica nanoparticles, cuprous oxide film was epitaxially grown into the template using electrodeposition. These three-dimensional, sub-100 nanometer silicon nanostructures and three-dimensional epitaxial cuprous oxide nanostructures are similar to the length scale of the mean free path of the phonons. The nanostructures fabricated in this thesis provide fabrication tools to prepare samples which can be used to investigate the nanoscale phonon transport. Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2013-07-15T19:39:20Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 2 HASEONG MASTER THESIS 2.docx: 7036763 bytes, checksum: b26d0e6e00371cd3ec0f297ea5701c04 (MD5) Kim_Ha_Seong.pdf: 3582248 bytes, checksum: db6db0a1ddf108a61c19c7ba0b68d88a (MD5) Made available in DSpace on 2013-08-22T16:47:08Z (GMT). No. of bitstreams: 3 Haseong_Kim.pdf: 3582248 bytes, checksum: db6db0a1ddf108a61c19c7ba0b68d88a (MD5) HASEONG MASTER THESIS 2.docx: 7036763 bytes, checksum: b26d0e6e00371cd3ec0f297ea5701c04 (MD5) license.txt: 4060 bytes, checksum: 6eeacd5fad5e224f56bacffee24920d9 (MD5) Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by Seth Robbins (srobbins@illinois.edu) on 2013-08-22T16:49:31Z Item is restricted until 2015-08-22T16:49:27Z Restriction data tranferred 2014-07-01T11:20:34-05:00 Original Data Group with Access UIUC Users [automated] Release Date: 2015-08-22 11:49:27 UTC Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system U of I Only Restriction Lifted for Item 45522 on 2015-08-22T10:00:34Z. http://hdl.handle.net/2142/45540 en Copyright 2013 Ha Seong Kim three-dimensional nanostructure fabrication inverse opal thermal transport cuprous oxide silicon Fabrication of three-dimensional nanostructures for thermal study text Materials Science & Engineerng 1919 Materials Science & Engr 0130 University of Illinois at Urbana-Champaign Thesis M.S. MS:Materials Sci & Engr -UIUC 10KS0130MS