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10000-01-01 Verdeyen, Joseph T. Hebner, Gregory Albert 2014-12-15T19:05:25Z 2014-12-15T19:05:25Z 1987 1987 Microwave diagnostic techniques have been used to measure the radiation temperature and electron density in parallel plate capacitively coupled radio frequency (2.5 MHz) discharges. Evidence is presented for the existence and importance of an energetic electron beam, produced by the large cathode sheath voltage, which sustains and excites the plasma. The measured radiation temperature of the bulk electrons is 500 K for helium and 800 K for argon. An upper limit on the radiation temperature is obtained for N$\sb2$ (1200 K) and CF$\sb4$ (3000 K) discharges. Measurements of the electron density in helium as a function of electrode spacing show a peak in the electron density that is consistent with the theory of ionization by beam electrons. The electric fields required to carry the RF current by drift in the bulk of the glow are low and consistent with the measured radiation temperature. The implications of these measurements on the nature of the RF plasma sustaining mechanism, the voltage distribution and the electron energy distribution are discussed. Made available in DSpace on 2014-12-15T19:05:25Z (GMT). No. of bitstreams: 1 8803062.pdf: 1481312 bytes, checksum: 3dc64b186c9ab16294322e1aab7c317a (MD5) Previous issue date: 1987 Embargo set by: Seth Robbins for item 69539 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 50 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1987. http://hdl.handle.net/2142/69373 (UMI)AAI8803062 Engineering, Electronics and Electrical Measurement of the Electron Radiation Temperature and Electron Density in Parallel Plate Radio Frequency Discharges text Electrical Engineering Electrical Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.