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Jiang, Jing 2015-07-22T22:18:09Z 2015-07-22T22:18:09Z 2015-05 2015-04-30 2015-5 We demonstrated fabrication of black silicon with slanted nano-pillar array on both planar and 3D micro- and mesoscale structures produced by a high-throughput lithography-free oblique-angle plasma etching process. Nano-pillars with gradual change in height were created on the same piece of silicon. The relation between the slant angle of nano-pillars and incident angle of directional plasma is experimentally investigated. In order to demonstrate the monolithic integration of nano-structures on micro- and mesoscale nonplanar surfaces, a nano-pillar forest is fabricated on nonplanar silicon surfaces in various morphologies such as silicon atomic force microscopy (AFM) tips and pyramidal pits. By integrating nano-pillars on inverse silicon micro-pyramid array devices, we further improved the surface-enhanced Raman scattering (SERS) enhancement property of this optimized commercial SERS substrate by severalfold even when using 66% less noble metal coating. We investigated the length gradient dependence and asymmetric properties of SERS effects for slanted nano-pillar with polarized excitation. This versatile and angle-controllable nano-pillar fabrication and monolithic 3D nano–micro–meso integration method provides new dimensions for production and optimization of SERS and other nano-photonic sensors. Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2015-07-22 without embargo terms The student, Jing Jiang, accepted the attached license on 2015-04-29 at 14:28. The student, Jing Jiang, submitted this Thesis for approval on 2015-04-29 at 14:33. This Thesis was approved for publication on 2015-04-30 at 07:49. DSpace SAF Submission Ingestion Package generated from Vireo submission #8191 on 2015-07-22 at 10:34:55 Made available in DSpace on 2015-07-22T22:18:09Z (GMT). No. of bitstreams: 2 JIANG-THESIS-2015.pdf: 1915207 bytes, checksum: 55105b87da97493238f49139dca7eb26 (MD5) LICENSE.txt: 4207 bytes, checksum: bf3a220d49637e23447577dc59cedb17 (MD5) Previous issue date: 2015-04-30 application/pdf http://hdl.handle.net/2142/78549 en Copyright 2015 Jing Jiang nano fabrication Raman spectroscopy silicon Silicon nano-structure fabrication and application for surface-enhanced Raman spectroscopy text text Electrical & Computer Eng Electrical & Computer Engr University of Illinois at Urbana-Champaign Thesis M.S.