2026-09-20T18:05:10Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/79022 2023-07-11 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

Kim, Seok Yang, Zining 2015-08-07T21:28:26Z 2015-08-07T21:28:26Z 2017-08-08T09:15:24Z 2014-12 2014-12-12 2014-12 This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated. application/pdf http://hdl.handle.net/2142/79022 Copyright 2014 Zining Yang transfer printing micro-masonry microassembly microscanner micromirror A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry text Mechanical Sci & Engineering Mechanical Engineering University of Illinois at Urbana-Champaign Thesis M.S.