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oai:www.ideals.illinois.edu:2142/80938 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Chang Liu Wang, Xuefeng 2015-09-25T20:08:55Z 2015-09-25T20:08:55Z 10000-01-01 2005 2005 This work addresses two major challenges faced by traditional single-probe SPL technology---lithography throughput and probe coating technique. System-level improvements of SPL have been successfully achieved. First, micromachined, thermally actuated cantilever probe arrays are developed to improve the throughput and flexibility of SPL. Multiple distinct patterns have been generated simultaneously with sub-50-nm line width in dip pen nanolithography (DPN) mode. Then, development of scanning probe contact printing (SPCP) technology and multifunctional probe arrays has expanded the capability of conventional single-functional SPL and demonstrated an excellent example of a highly integrated scanning probe device for pattern generation in DPN and SPCP modes and pattern inspection in AFM and LFM modes. In addition, the development of integrated microfluidic inking chips for chemical ink handling and SPL probe treatment further enhances the power of arrayed scanning probes. The inking chip can potentially coat an array of SPL tips with different inks simultaneously for multi-ink lithography. Made available in DSpace on 2015-09-25T20:08:55Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3199167.pdf: 5187710 bytes, checksum: a442b43f7c2eb0d37c27788e3e4add51 (MD5) Previous issue date: 2005 Embargo set by: Seth Robbins for item 82220 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 143 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2005. http://hdl.handle.net/2142/80938 (MiAaPQ)AAI3199167 eng Engineering, Electronics and Electrical Microelectromechanical and Microfluidic Systems for Scanning Probe Lithography text Electrical Engineering Electrical Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.