2026-09-19T09:17:56Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/81185 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Kushner, M.J. Hwang, Helen H. 2015-09-25T20:09:58Z 2015-09-25T20:09:58Z 10000-01-01 1997 1997 Particle transport is also affected by Coulomb interactions between particles. Experimental observations showed that in trapping sites particles form clouds and move collectively. We numerically investigated Coulomb interactions between particles. In rf discharges, ordered systems (Coulomb liquids or solids) occur at low particle temperatures. Dislocations in lattices result because of impurities of differently sized particles due to the disparity in particle charges. Waves may be induced by impacting a Coulomb solid with energetic particles. Repeated impacts can liquify the lattice if the particles do not dissipate enough energy as a result of fluid drag effects or Coulomb collisions. Made available in DSpace on 2015-09-25T20:09:58Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 9737140.pdf: 4399520 bytes, checksum: afd3555a65118f991a800ef9738d9dd0 (MD5) Previous issue date: 1997 Embargo set by: Seth Robbins for item 82466 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 126 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997. http://hdl.handle.net/2142/81185 (MiAaPQ)AAI9737140 eng Engineering, Materials Science Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination text Electrical Engineering Electrical Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.