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oai:www.ideals.illinois.edu:2142/82360 2023-07-11 col_2142_5131 col_2142_11615 com_2142_5130 com_2142_9130 com_2142_8903

Kushner, Mark J. Subramonium, Pramod 2015-09-25T20:43:17Z 2015-09-25T20:43:17Z 10000-01-01 2003 2003 In this thesis, two-dimensional (2D) and 3D hybrid models were developed to investigate transient phenomena (time variation of plasma properties) during pulsed operation of ICP reactors. Employing the 2D model, it was demonstrated that utilizing transients during pulsed operation, energetic negative ions can be extracted from pulsed ICPs that can aid in reducing charge buildup on wafers. Energetic negative ions can be extracted from Ar/Cl2 pulsed ICPs with pulsed low frequency (1--2 MHz) substrate biases. Employing the 3D model, the impact of asymmetric pumping on plasma properties during continuous wave (CW) ICP operation and the effect of transients on these flow-induced asymmetries were quantified. Asymmetric pumping results in non-uniform species densities, which then feed back through plasma conductivity making the power deposition azimuthally asymmetric. The asymmetries in plasma properties increase with increase in power and gas flow rate. Pulsed operation of ICPs improves the uniformity of plasma properties as it reduces the positive feedback between species density and power deposition. In Ar ICPs, the plasma parameters were more uniform relative to CW operation on decreasing duty cycle or pulse repetition frequency (PRF). Made available in DSpace on 2015-09-25T20:43:17Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3111643.pdf: 7283091 bytes, checksum: 23f2b66f9575e17ab62fabfeb2b40f52 (MD5) Previous issue date: 2003 Embargo set by: Seth Robbins for item 83641 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 174 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2003. http://hdl.handle.net/2142/82360 (MiAaPQ)AAI3111643 eng Engineering, Electronics and Electrical Simulation of Transients and Transport in Plasma Processing Reactors text Chemical and Biomolecular Engineering Chemical and Biomolecular Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.