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        <identifier>oai:www.ideals.illinois.edu:2142/82711</identifier>
        <datestamp>2023-07-11</datestamp>
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        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:contributor>Greene, Joseph E.</dc:contributor>
          <dc:creator>Spila, Timothy Paul</dc:creator>
          <dc:date>2015-09-25T20:52:35Z</dc:date>
          <dc:date>2015-09-25T20:52:35Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2001</dc:date>
          <dc:date>2001</dc:date>
          <dc:description>Si0.7Ge0.3(001) layers were grown at Ts = 450&amp;deg;C, where strain-induced roughening is completely quenched, to thicknesses greater than the critical value for misfit dislocation formation (tc  &amp;sime; 100 nm) to probe the effect of thetaH on cross-hatch formation. At t slightly larger than tc, surface roughness is dominated by single- and multiple-atomic-height steps associated with the interfacial misfits. The surface steps are preferential H desorption sites, thus the increased total step length results in a decrease in thetaH on terraces which increases RSiGe and allows higher adatom ascending step crossing probabilities which, driven by the inhomogeneous strain fields around the misfit dislocation clusters, contributes to the growth of periodic ridges.</dc:description>
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  Previous issue date: 2001</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 83992
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:description>84 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/82711</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3030481</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Physics, Condensed Matter</dc:subject>
          <dc:title>Reaction Paths for Self-Organized Surface Roughening of Silicon-Germanium Alloys During Hydride Gas-Source Molecular Beam Epitaxy</dc:title>
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            <department>Materials Science and Engineering</department>
            <discipline>Materials Science and Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
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