<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-19T16:05:17Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/82732" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/82732</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_13836</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_13835</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:contributor>Cahill, D.G.</dc:contributor>
          <dc:creator>Raviswaran, Arvind</dc:creator>
          <dc:date>2015-09-25T20:52:43Z</dc:date>
          <dc:date>2015-09-25T20:52:43Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2002</dc:date>
          <dc:date>2002</dc:date>
          <dc:description>I have investigated the evolution of islands during the heteroepitaxy of Si on Ge(111). This study involves a systematic investigation of the island nucleation kinetics, morphology and microstructure for various thicknesses and deposition temperatures. The islands formed are predominantly three-dimensional. A large density of islands (&gt;1011 cm-2) is observed during growth at low temperatures (600&amp;deg;C) yield a lower density of islands. The activation energy for the nucleation of these islands is &amp;ap;1.7 eV. The islands deposited at temperatures &lt;550&amp;deg;C are predominantly coherent, while those formed at higher temperatures are incoherent, with a transition size of &amp;ap;18 nm.</dc:description>
          <dc:description>Made available in DSpace on 2015-09-25T20:52:43Z (GMT). No. of bitstreams: 2
license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5)
3070417.pdf: 4138922 bytes, checksum: 5c8340beb00c822fc9bf54713e52d6e1 (MD5)
  Previous issue date: 2002</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 84013
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:description>162 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/82732</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3070417</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Engineering, Materials Science</dc:subject>
          <dc:title>Morphological Evolution During Molecular Beam Epitaxy of Germanium/germanium(001) and Silicon/germanium(111)</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <department>Materials Science and Engineering</department>
            <discipline>Materials Science and Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
