<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-23T03:13:18Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/82780" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/82780</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_13836</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_13835</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:description>U of I Only</dc:description>
          <dc:contributor>Nuzzo, Ralph G.</dc:contributor>
          <dc:creator>Lee, Keon Jae</dc:creator>
          <dc:date>2015-09-25T20:53:00Z</dc:date>
          <dc:date>2015-09-25T20:53:00Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2006</dc:date>
          <dc:date>2006</dc:date>
          <dc:description>Another main focus of my research is macroelectronics, referred to flexible and large area electronics. We employed newly developed technology from our group, called microstructured semiconductor (mus-Sc) that carved from bulk single crystal wafer using the standard microfabrication process. Soft lithographic approach was used to print this form of mus-Sc onto plastic substrate and it overcame many current limitations of the flexible electronics. High performance mus-Sc devices using both single crystal Si and GaN materials were successfully fabricated on plastic substrate.</dc:description>
          <dc:description>Made available in DSpace on 2015-09-25T20:53:00Z (GMT). No. of bitstreams: 2
license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5)
3223643.pdf: 5042542 bytes, checksum: 987b9a1bf73a9c5037eb49468361c3a4 (MD5)
  Previous issue date: 2006</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 84061
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>169 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/82780</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3223643</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Engineering, Electronics and Electrical</dc:subject>
          <dc:title>Advanced Soft Lithography and Microstructured Semiconductors (mus-Sc) for Macroelectronics</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <department>Materials Science and Engineering</department>
            <discipline>Materials Science and Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
