2026-09-20T20:23:23Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/83779 2023-07-11 col_2142_5131 col_2142_14787 com_2142_5130 com_2142_9630 com_2142_234

Leslie M. Phinney Rogers, James W. 2015-09-25T21:12:02Z 2015-09-25T21:12:02Z 10000-01-01 2002 2002 A MEMS temperature sensor based on the buckling of fixed-fixed beams due to thermal expansion is designed, fabricated, and tested. Difficulties from fabrication including residual stress, and limited temporal and spatial resolution of the imaging system hindered the device performance, but fixed-fixed MEMS beams are used estimate the temperature difference between the beam and substrate and cooling time after laser irradiation. Made available in DSpace on 2015-09-25T21:12:02Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3070043.pdf: 7183176 bytes, checksum: b59fe9efff64619540e09c9f3fd09867 (MD5) Previous issue date: 2002 Embargo set by: Seth Robbins for item 85060 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 161 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002. http://hdl.handle.net/2142/83779 (MiAaPQ)AAI3070043 eng Engineering, Mechanical Theoretical, Experimental, and Numerical Investigations Into Laser Repair of Adhered MEMS Structures text Mechanical Engineering Mechanical Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.