<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-21T23:51:44Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/83813" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/83813</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_14787</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_9630</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:contributor>Philpott, Michael L.</dc:contributor>
          <dc:contributor>Shannon, Mark A.</dc:contributor>
          <dc:creator>Jiang, Bo</dc:creator>
          <dc:date>2015-09-25T21:12:16Z</dc:date>
          <dc:date>2015-09-25T21:12:16Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2004</dc:date>
          <dc:date>2004</dc:date>
          <dc:description>To further improve form accuracy obtained on the compliant grinding apparatus, a normal grinding force model and a depth of cut model were developed to account for the large compliance in the grinding system. Numerical simulation was performed to predict actual depths of cut and the results were within 6% of the measured/actual depths.</dc:description>
          <dc:description>Made available in DSpace on 2015-09-25T21:12:16Z (GMT). No. of bitstreams: 2
license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5)
3153333.pdf: 13163289 bytes, checksum: e35c91eed7885090fce2addbf16ab149 (MD5)
  Previous issue date: 2004</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 85094
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:description>186 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2004.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/83813</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3153333</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Engineering, Materials Science</dc:subject>
          <dc:title>Compliant Meso-Scale Grinding of Silicon</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <department>Mechanical Engineering</department>
            <discipline>Mechanical Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
