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Polycarpou, Andreas A. Xue, Xiaojie 2015-09-25T21:12:37Z 2015-09-25T21:12:37Z 10000-01-01 2007 2007 Based on the Extended-Maugis-Dugdale (EMD) elastic theory, an improved single asperity meniscus model considering asperity deformation due to both contact and adhesive forces was developed. Specifically included in this model was the solid surface interaction inside the contact area. It was found that due to asperity deformations, the capillary force of contacting asperities increases with increasing interference, rather than being a constant value as predicted by existing models. Moreover, when the asperity contacts with the substrate, the solid surface interaction inside the contact zone also contributes to the total adhesive force and it increases with increasing interference. This single asperity meniscus model was coupled with the Pearson surface statistical model to develop an improved elastic asymmetric meniscus surface model applicable to a wide-range of humidity levels and adhesion parameter values. By integrating the force-displacement curve, the adhesion energy per unit area was calculated for MEMS surfaces, which matched the experimental data very well from low to high relative humidity (RH) values, while the existing model greatly underestimated the adhesion energy at low RH.. Made available in DSpace on 2015-09-25T21:12:37Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3290439.pdf: 4699004 bytes, checksum: a285b36ae3be5e031dc84f79f6b333a3 (MD5) Previous issue date: 2007 Embargo set by: Seth Robbins for item 85173 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 155 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2007. http://hdl.handle.net/2142/83892 (MiAaPQ)AAI3290439 eng Engineering, Electronics and Electrical Theoretical and Experimental Investigation of Adhesion in Microelectromechanical Systems text Mechanical Engineering Mechanical Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.