2026-09-20T09:27:53Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/84062 2023-07-11 col_2142_5131 col_2142_14789 com_2142_5130 com_2142_14788 com_2142_8903

Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002. http://hdl.handle.net/2142/84062 (MiAaPQ)AAI3044104 eng U of I Only 128 p. Engineering, Materials Science Girolami, Gregory S. Nuzzo, Ralph G. Harada, Yoshiko 2015-09-25T22:12:40Z 2015-09-25T22:12:40Z 10000-01-01 2002 2002 Two examples of Si patterning via microcontact printing (muCP) are given in this thesis. In both cases, Si substrates were patterned with OTS by MCP to protect the underlying substrate. The first example shows the use of an OTS template in orthogonal printing of OCT to activate OTS-free areas, followed by surface-initiated ring-opening metathesis polymerization (ROMP) of strained olefins to amplify the original pattern inscribed by muCP In the second example, an OTS template was used to selectively deposit a Pt(O) complex, which was used in Pt-assisted etching of Si(100) to produce porous silicon structures in the Pt-coated regions. Made available in DSpace on 2015-09-25T22:12:40Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3044104.pdf: 5429648 bytes, checksum: 3fc534c775015da2ad8676bce193db06 (MD5) Previous issue date: 2002 Embargo set by: Seth Robbins for item 85343 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Amplification of Soft Lithographic Patterning of Silicon text Chemistry Chemistry University of Illinois at Urbana-Champaign Dissertation Ph.D.