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oai:www.ideals.illinois.edu:2142/85109 2023-07-11 col_2142_5131 col_2142_14800 com_2142_5130 com_2142_14799 com_2142_234

eng Chasiotis, Ioannis Jonnalagadda, Krishna Nagasai 2015-09-25T22:34:27Z 2015-09-25T22:34:27Z 10000-01-01 2008 2008 The results of this research provided fundamental information about thin film failure at the scale of MEMS, which could be directly applied to perform materials selection and design of MEMS components. The experimental methods described in this thesis were shown to be entirely repeatable and directly applicable to any thin film material. Consequently, they represent a protocol with the potential to become a standardized technique for mechanical property studies at the micron and the nanometer scales. Made available in DSpace on 2015-09-25T22:34:27Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3314810.pdf: 2561898 bytes, checksum: 5bd666fca567ce00fbae8bec34352feb (MD5) Previous issue date: 2008 Embargo set by: Seth Robbins for item 86390 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs U of I Only 127 p. Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008. http://hdl.handle.net/2142/85109 (MiAaPQ)AAI3314810 Engineering, Aerospace Failure and Fracture of Thin Film Materials for MEMS text Aerospace Engineering Aerospace Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.