<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-20T12:02:07Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/85111" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/85111</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_14800</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_14799</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:contributor>Lambros, John</dc:contributor>
          <dc:creator>Kimberley, Jamie</dc:creator>
          <dc:date>2015-09-25T22:34:27Z</dc:date>
          <dc:date>2015-09-25T22:34:27Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2008</dc:date>
          <dc:date>2008</dc:date>
          <dc:description>The response of cantilever beams, representing modle test structures, comprised of metal and ceramic layers was also investigated. Experiments were conducted using the modified split hopkinson pressure bar to investigate the effects of loading amplitude, duration, and profile on the failure of the cantilever beams. Finite element simulations of these beams were conducted to provide more detailed information regarding the deformation of the beams under the various loadings applied in the experiments. Results of the simulations were coupled with experimental measurements of failure stress (measured in quasistatic microtensile tests) in an attempt to predict failure. High-speed imaging was also used to capture the first real-time images of MEMS structures responding to dynamic loading.</dc:description>
          <dc:description>Made available in DSpace on 2015-09-25T22:34:27Z (GMT). No. of bitstreams: 2
license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5)
3314822.pdf: 3931560 bytes, checksum: cd6cf6a8bd8d90492d7fde0f561e53b4 (MD5)
  Previous issue date: 2008</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 86392
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:description>171 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2008.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/85111</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3314822</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Engineering, Mechanical</dc:subject>
          <dc:title>Failure of Microelectromechanical Systems Under Dynamic Loading: An Experimental and Numerical Investigation</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <department>Aerospace Engineering</department>
            <discipline>Aerospace Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
