<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-23T02:45:57Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/85914" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/85914</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_14837</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_14836</setSpec>
        <setSpec>com_2142_234</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:description>238 p.</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Made available in DSpace on 2015-09-28T14:51:07Z (GMT). No. of bitstreams: 2
license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5)
3290332.pdf: 7001342 bytes, checksum: c33fb8457dc480d809e5424e4dbbae34 (MD5)
  Previous issue date: 2007</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 87195
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:contributor>Ruzic, David N.</dc:contributor>
          <dc:creator>Neumann, Martin John</dc:creator>
          <dc:date>2015-09-28T14:51:07Z</dc:date>
          <dc:date>2015-09-28T14:51:07Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2007</dc:date>
          <dc:date>2007</dc:date>
          <dc:description>The simultaneous process of deposition, evaporation, and sputtering of lithium was modeled and corroborated with experimental observations such that no net deposition on the collector optic was measured and showed the model to being a viable option that can be used for predictive scenarios involving deposition, evaporation, and sputtering are undertaken.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2007.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/85914</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3290332</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Physics, Fluid and Plasma</dc:subject>
          <dc:title>Lithium Debris Removal by Sputtering and Evaporation for EUV Optics and Applications</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <department>Nuclear Engineering</department>
            <discipline>Nuclear Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
