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        <identifier>oai:www.ideals.illinois.edu:2142/85931</identifier>
        <datestamp>2023-07-11</datestamp>
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          <dc:contributor>Ruzic, David N.</dc:contributor>
          <dc:creator>Turkot, Robert Bruce, Jr</dc:creator>
          <dc:date>2015-09-28T14:51:18Z</dc:date>
          <dc:date>2015-09-28T14:51:18Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>1997</dc:date>
          <dc:date>1997</dc:date>
          <dc:description>The $\rm SiO\sb2$ films deposited in this system are analyzed for their gas permeation qualities and are correlated to the plasma properties gathered using Langmuir probes as well as the gas, pressure, and time recipes used to produce them. It is found in this work that the application of $\rm SiO\sb2$ films onto flexible PET bottles using the fashion explained herein results in a decrease in the gas permeation characteristics of the $\rm SiO\sb2$-PET membrane as desired, but is found to be independent of the thickness of the $\rm SiO\sb2$ present. This limit is found to be caused by cracks and pinhole defects across the $\rm SiO\sb2$ film that permit uninhibited gas flow directly to the PET bottle.</dc:description>
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  Previous issue date: 1997</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 87212
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:description>273 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1997.</dc:description>
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          <dc:identifier>(MiAaPQ)AAI9717340</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Engineering, Materials Science</dc:subject>
          <dc:title>Plasma-Material Interactions: A Langmuir Probe Analysis of a Cylindrical SiO(2) Deposition System and a Computational Study Using VFTRIM3D</dc:title>
          <dc:type>text</dc:type>
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            <department>Nuclear Engineering</department>
            <discipline>Nuclear Engineering</discipline>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
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