<?xml version="1.0" encoding="UTF-8"?>
<?xml-stylesheet type="text/xsl" href="/oai-pmh.xsl"?>
<OAI-PMH xmlns="http://www.openarchives.org/OAI/2.0/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/ http://www.openarchives.org/OAI/2.0/OAI-PMH.xsd">
  <responseDate>2026-09-21T00:02:30Z</responseDate>
  <request identifier="oai:www.ideals.illinois.edu:2142/87883" metadataPrefix="etdms" verb="GetRecord">https://www.ideals.illinois.edu/oai-pmh</request>
  <GetRecord>
    <record>
      <header>
        <identifier>oai:www.ideals.illinois.edu:2142/87883</identifier>
        <datestamp>2023-07-11</datestamp>
        <setSpec>col_2142_5131</setSpec>
        <setSpec>col_2142_14789</setSpec>
        <setSpec>com_2142_5130</setSpec>
        <setSpec>com_2142_14788</setSpec>
        <setSpec>com_2142_8903</setSpec>
      </header>
      <metadata>
        <thesis xmlns="http://www.ndltd.org/standards/metadata/etdms/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dc="http://purl.org/dc/elements/1.1/" xsi:schemaLocation="http://www.ndltd.org/standards/metadata/etdms/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdms11.xsd http://purl.org/dc/elements/1.1/ http://www.ndltd.org/standards/metadata/etdms/1.1/etdmsdc.xsd">
          <dc:contributor>Klemperer, Walter G.</dc:contributor>
          <dc:creator>Lee, Jason</dc:creator>
          <dc:date>2015-09-28T21:57:26Z</dc:date>
          <dc:date>2015-09-28T21:57:26Z</dc:date>
          <dc:date>10000-01-01</dc:date>
          <dc:date>2002</dc:date>
          <dc:date>2002</dc:date>
          <dc:description>The Si-H bonds on the H-Si(111) surface and Co2(CO)8  in n-heptane solution reacted to form a well defined submonolayer coverage of Co(CO)4 above the surface plane of Si(111). Transmission Fourier-transform infrared spectroscopy analysis of (OC) 4Co-Si(111) yielded structural and geometric information about the adsorbate. Accurate quantitative areal concentrations of cobalt deposited on the surface were obtained using Rutherford backscattering spectrometry. X-ray photoelectron spectroscopy analysis furnished the chemical state of the adsorbates as well as quantitative information. Static secondary ion mass spectrometry analysis detected the presence of the desired product and trace amounts of byproducts on the surface. Finally, numerical simulations of irreversible adsorption were used to calculate theoretical yields for comparisons to the experimental coverage values.</dc:description>
          <dc:description>Made available in DSpace on 2015-09-28T21:57:26Z (GMT). No. of bitstreams: 2
license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5)
3044155.pdf: 3772679 bytes, checksum: a8063ee40d4972c9428655c16a728c6a (MD5)
  Previous issue date: 2002</dc:description>
          <dc:description>Embargo set by: Seth Robbins for item 89164
Lift date: Forever
Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs</dc:description>
          <dc:description>U of I Only</dc:description>
          <dc:description>99 p.</dc:description>
          <dc:description>Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2002.</dc:description>
          <dc:identifier>http://hdl.handle.net/2142/87883</dc:identifier>
          <dc:identifier>(MiAaPQ)AAI3044155</dc:identifier>
          <dc:language>eng</dc:language>
          <dc:subject>Engineering, Materials Science</dc:subject>
          <dc:title>Deposition of Metal Oxides and Metal Carbonyls on Silicon Surfaces Using Solution Chemistry</dc:title>
          <dc:type>text</dc:type>
          <degree>
            <grantor>University of Illinois at Urbana-Champaign</grantor>
            <level>Dissertation</level>
            <name>Ph.D.</name>
          </degree>
        </thesis>
      </metadata>
    </record>
  </GetRecord>
</OAI-PMH>
