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raman Petrov, Ivan Rockett, Angus A. Greene, Joseph E Allen, Lesli Zuo, Jian-Min Mei, Antonio Rodolph Bighetti 2015-09-29T20:37:34Z 2015-09-29T20:37:34Z 2015-08 2015-05-20 Submission original under an indefinite embargo labeled 'Open Access'. The submission was exported from vireo on 2015-09-29 without embargo terms The student, Antonio Rodolph Mei, accepted the attached license on 2015-05-18 at 10:06. The student, Antonio Rodolph Mei, submitted this Dissertation for approval on 2015-05-18 at 10:13. This Dissertation was approved for publication on 2015-05-20 at 16:45. DSpace SAF Submission Ingestion Package generated from Vireo submission #8245 on 2015-09-29 at 13:21:10 Made available in DSpace on 2015-09-29T20:37:34Z (GMT). No. of bitstreams: 2 MEI-DISSERTATION-2015.pdf: 42283741 bytes, checksum: da6bf50e64cb109a27ceee5ded28e396 (MD5) LICENSE.txt: 4216 bytes, checksum: 57ef51a940328202b79fc9513de7319d (MD5) Previous issue date: 2015-05-20 application/pdf http://hdl.handle.net/2142/87950 en Copyright 2015 Antonio Rodolph Bighetti Mei nitrides transition-metal nitrides titanium nitride vanadium nitride zirconium nitride hafnium nitride magnetron sputtering unbalanced magnetron sputter deposition anharmonic phonons transport resistivity elastic constants eliashberg electron-phonon coupling ellipsometry dielectric function hardness modulus thin film epitaxial epitaxy growth Lattice dynamics and electron/phonon interactions in epitaxial transition-metal nitrides text text 2015-8 Materials Science & Engineerng Materials Science & Engr University of Illinois at Urbana-Champaign Dissertation Ph.D.