2026-09-19T16:06:51Z https://www.ideals.illinois.edu/oai-pmh

oai:www.ideals.illinois.edu:2142/89203 2023-07-11 col_2142_5131 col_2142_8888 com_2142_5130 com_2142_8887 com_2142_234

Rogers, John A. Rogers, John A. Lyding, Joseph W. Li, Xiuling Liu, Gang L. Yu, Ki Jun 2016-03-02T21:06:33Z 2016-03-02T21:06:33Z 2018-03-03T10:15:35Z 2015-11-18 2015-12 In recent years, research in flexible electronic systems has increased due to its potential to create and manipulate new classes of applications (e.g., foldable and flexible display, flexible photovoltaic, epidermal electronics, and other systems) that can be integrated outside of conventional wafer-based electronics. With suitable choice of materials and design strategies, inorganic semiconductors (e.g., Si and GaAs) can be used on unconventional substrates for mechanical flexibility and high electrical performance. This dissertation presents the fabrication of mono-crystalline Si electronics by using top-down approaches. We describe five related topics of ultra-thin Si electronics which involve forming structures and assembling them by structured or non-structured elastomeric stamps or bulk wafer etching techniques. Furthermore, this dissertation demonstrates a strategy in which modules consist of large-scale arrays of interconnected high-performance ultra-thin Si electronics that are mechanically flexible, stretchable, and semitransparent, along with in-depth studies of their electrical and mechanical properties and applications. Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2017-12-01 The student, Ki Jun Yu, accepted the attached license on 2015-11-16 at 18:34. The student, Ki Jun Yu, submitted this Dissertation for approval on 2015-11-16 at 18:53. This Dissertation was approved for publication on 2015-11-18 at 17:03. DSpace SAF Submission Ingestion Package generated from Vireo submission #8793 on 2016-03-02 at 14:13:11 Made available in DSpace on 2016-03-02T21:06:33Z (GMT). No. of bitstreams: 2 YU-DISSERTATION-2015.pdf: 7289805 bytes, checksum: 237a3501ae27661939eaa09edc817fba (MD5) LICENSE.txt: 4206 bytes, checksum: a32eaee355b074ac82cc57bf9f8fce7a (MD5) Previous issue date: 2015-11-18 Embargo set by: Seth Robbins for item 91406 Lift date: 2018-03-02T21:07:27Z Reason: Author requested closed access (OA after 2yrs) in Vireo ETD system Limited Restriction Lifted for Item 91406 on 2018-03-03T10:15:35Z. application/pdf http://hdl.handle.net/2142/89203 en Copyright 2015 Ki Jun Yu Ultra-thin silicon flexible and stretchable electronics Printed microscale mono-crystalline silicon on flexible substrates for photovoltaic, strain sensors, and neural interface applications text text Electrical & Computer Engineering Electrical & Computer Engineering University of Illinois at Urbana-Champaign Dissertation Ph.D.