University of Illinois Urbana-Champaign

Structure and Electrical Properties of RF Sputter Deposited Indium Antimonide Thin Films

Wickersham, Charles E., Jr.

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https://hdl.handle.net/2142/75109

Description

Title
Structure and Electrical Properties of RF Sputter Deposited Indium Antimonide Thin Films
Author(s)
Wickersham, Charles E., Jr.
Issue Date
1975-12
Publisher
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
Series/Report Name or Number
Coordinated Science Laboratory Report no. UILU-ENG 75-2241, R-705
Type of Resource
text
Language
English
Permalink
http://hdl.handle.net/2142/75109
Sponsor(s)/Grant Number(s)
Joint Services Electronics Program / DAAB-07-72-C-0259

Owning Collections

Report - Coordinated Science Laboratory PRIMARY