A fuzzy logic control system for a high temperature semiconductor furnace
Buszkiewicz, Jim Raymond
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https://hdl.handle.net/2142/97986
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Title A fuzzy logic control system for a high temperature semiconductor furnace Author(s) Buszkiewicz, Jim Raymond Issue Date 1994 Director of Research (if dissertation) or Advisor (if thesis) Uribe, Ricardo B. Department of Study Electrical & Computer Engineering Discipline Electrical & Computer Engineering Degree Granting Institution University of Illinois at Urbana-Champaign Keyword(s) Electrical engineering Contactor control systems Electric furnaces Fuzzy logic Language en Permalink http://hdl.handle.net/2142/97986 Copyright and License Information Copyright 1994 held by Jim Raymond Buszkiewicz
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Dissertations and Theses in Electrical and Computer Engineering
