University of Illinois Urbana-Champaign

A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications

Nan, Kewang

Content Files
NAN-DISSERTATION-2018.pdf

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https://hdl.handle.net/2142/102450

Description

Title
A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications
Author(s)
Nan, Kewang
Issue Date
2018-11-30
Director of Research (if dissertation) or Advisor (if thesis)
  • Rogers, John A.
  • Braun, Paul V.
Doctoral Committee Chair(s)
Kim, Seok
Committee Member(s)
Li, Xiuling
Department of Study
Mechanical Sci & Engineering
Discipline
Mechanical Engineering
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
Ph.D.
Degree Level
Dissertation
Date of Ingest
2019-02-06T19:36:08Z
Keyword(s)
  • mechanically-guided 3D assembly
  • micro fabrications
  • flexible and stretchable electronics
Abstract
Controlled formation of three-dimensional functional mesostructures (3DFMs) has broad engineering implications in biomedical devices, microelectromechanical systems (MEMS), optics, and energy storage. Most existing 3D techniques, however, not only lack compatibility with essential electronic materials (silicon, metals, ceramics) that exist in solid-state or crystalline forms, but also produce in a slow and inefficient manner. This is in stark contrast to the planar technologies widely adopted by the modern semiconductor industry. I propose to solve these challenges by a novel 3D assembly strategy based on the planar technologies, which involves precisely controlled 2D-to-3D transformations via the substrate-induced mechanical buckling. This lithography-based, mechanically-guided 3D approach is compatible with virtually any engineering thin films including semiconductors, metals, and polymers, applies to a wide range of length scales and geometries and produces in a high throughput. In this dissertation, I present strategies that combine fabrications and mechanics to achieve a set of complex 3D geometries. I also study the potentials of the 3DFMs in micro-robotics. I further demonstrate the unique applications in energy harvesting, bio-integrated systems, and nanoscale sensing. The results may enlighten the development of advanced, multi-functional 3D electronic micro-systems inaccessible to other 3D techniques.
Graduation Semester
2018-12
Type of Resource
text
Permalink
http://hdl.handle.net/2142/102450
Copyright and License Information
Copyright 2018 Kewang Nan

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Dissertations and Theses - Mechanical Science and Engineering