A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications

Nan, Kewang

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https://hdl.handle.net/2142/102450 Copy

Description

Title

A mechanically-guided approach to three-dimensional functional mesostructures towards unconventional applications

Author(s)

Nan, Kewang

Issue Date

2018-11-30

Director of Research (if dissertation) or Advisor (if thesis)

• Rogers, John A.
• Braun, Paul V.

Doctoral Committee Chair(s)

Kim, Seok

Committee Member(s)

Li, Xiuling

Department of Study

Mechanical Sci & Engineering

Discipline

Mechanical Engineering

Degree Granting Institution

University of Illinois at Urbana-Champaign

Degree Name

Ph.D.

Degree Level

Dissertation

Keyword(s)

• mechanically-guided 3D assembly
• micro fabrications
• flexible and stretchable electronics

Abstract

Controlled formation of three-dimensional functional mesostructures (3DFMs) has broad engineering implications in biomedical devices, microelectromechanical systems (MEMS), optics, and energy storage. Most existing 3D techniques, however, not only lack compatibility with essential electronic materials (silicon, metals, ceramics) that exist in solid-state or crystalline forms, but also produce in a slow and inefficient manner. This is in stark contrast to the planar technologies widely adopted by the modern semiconductor industry. I propose to solve these challenges by a novel 3D assembly strategy based on the planar technologies, which involves precisely controlled 2D-to-3D transformations via the substrate-induced mechanical buckling. This lithography-based, mechanically-guided 3D approach is compatible with virtually any engineering thin films including semiconductors, metals, and polymers, applies to a wide range of length scales and geometries and produces in a high throughput. In this dissertation, I present strategies that combine fabrications and mechanics to achieve a set of complex 3D geometries. I also study the potentials of the 3DFMs in micro-robotics. I further demonstrate the unique applications in energy harvesting, bio-integrated systems, and nanoscale sensing. The results may enlighten the development of advanced, multi-functional 3D electronic micro-systems inaccessible to other 3D techniques.

Graduation Semester

2018-12

Type of Resource

text

Permalink

http://hdl.handle.net/2142/102450

Copyright and License Information

Copyright 2018 Kewang Nan

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