Director of Research (if dissertation) or Advisor (if thesis)
Vlasov, Yurii A
Department of Study
Electrical & Computer Eng
Discipline
Electrical & Computer Engr
Degree Granting Institution
University of Illinois at Urbana-Champaign
Degree Name
M.S.
Degree Level
Thesis
Date of Ingest
2022-04-29T21:34:49Z
Keyword(s)
Engineering
Language
eng
Abstract
A silicon neural probe enables the monitoring of chemical dynamics with high spatial and temporal resolution and good chemical sensitivity and selectivity while causing less tissue damage than conventional micro-dialysis probes. Neural activity can be optically stimulated using optogenetics, which can be enabled using an off-chip light source and an optical grating coupler. In this thesis, we discuss the design and fabrication of waveguides and grating couplers, which can be used as a foundation for light delivery systems for various biological applications. Chapter 2 provides some background knowledge on waveguides and grating couplers, the design of which is described in Chapter 3. Chapter 4 covers the fabrication process, and Chapter 5 contains some concluding remarks and possible next steps.
Use this login method if you
don't
have an
@illinois.edu
email address.
(Oops, I do have one)
IDEALS migrated to a new platform on June 23, 2022. If you created
your account prior to this date, you will have to reset your password
using the forgot-password link below.
