Advances In Microcavity Plasma Science and Applications: VUV Photolithography, Disinfection of Air and Drinking Water, Atomic Clocks, and 3D Plasma Photonic Crystals

Eden, J. Gary

Permalink

https://hdl.handle.net/2142/121892 Copy

Description

Title

Advances In Microcavity Plasma Science and Applications: VUV Photolithography, Disinfection of Air and Drinking Water, Atomic Clocks, and 3D Plasma Photonic Crystals

Author(s)

Eden, J. Gary

Contributor(s)

• Park, Sung-Jin
• Mironov, Andrey

Issue Date

2024-02-14

Keyword(s)

• microplasma
• laser
• fusion
• drinking water

Abstract

After more than two decades of research and engineering development, microcavity plasma devices are increasingly impacting a remarkable range of applications. This presentation will briefly review a few rapidly-growing commercial applications, including VUV photolithography and solid-state photochemistry, as well as the disinfection of room air and drinking water. Emerging applications in 3D plasma photonic crystals for 100-500 GHz communications and atomic clocks will also be discussed.

Has Part

https://youtu.be/cwoTyu1Q8xg

Series/Report Name or Number

Sustainable Seminar Series

Type of Resource

• text
• moving image

Language

eng

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